http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016048779-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2015-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87e7e5285ead7bf19ff650556f3a9d70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b369d78a4da0701f9329db7e5b1248a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8be0a63328acdcb3f1d9ef03c6c1b0a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48e3670c36aff59b52bf28b1aa4a961c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf77397f95e3e9867ec307cc25d23817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0aa7592f243382ca26e37e19eda520 |
| publicationDate | 2016-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016048779-A |
| titleOfInvention | Circuit device having three-dimensional wiring, method for forming three-dimensional wiring, and composition for forming metal film for three-dimensional wiring |
| abstract | A circuit having a three-dimensional wiring having a good conductivity and having a three-dimensional wiring that can be easily manufactured with a relatively high productivity and a relatively low manufacturing cost. Providing the device. In manufacturing a through silicon via substrate 1 having a three-dimensional wiring in which an upper wiring 12a and a lower wiring 13a are electrically connected to each other by a contact plug 14a, the contact plug CP is connected to the bottom seed layer BS. The bottom seed layer BS is formed of a conductor layer formed by vapor deposition, and the main seed layer MS is composed of the 10th and 11th groups of the periodic table. It forms by heating the coating film of the composition for metal film formation containing at least one of the metal salt chosen from a group, and particle | grains. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113284997-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113284997-A |
| priorityDate | 2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 313.