http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016044354-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G04B19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2014-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fa2608c1f5757c8e04936d45a8c6a1e |
| publicationDate | 2016-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016044354-A |
| titleOfInvention | Film forming apparatus, film forming method, and decorative article |
| abstract | There is provided a film forming apparatus capable of efficiently forming a desired shape and pattern by a method with less waste of materials and less burden on the environment. A housing part 43 for housing a film forming material P3 ', a heating means 4 for heating the material P3' housed in the housing part 43, and a housing part 43 are installed to evaporate the material P3 '. The apparatus includes a vapor generation chamber 15 and a film formation chamber 16 that forms a film on the substrate P1 using fine particles P31 formed by condensation of the vapor of the material P3 ′ generated in the vapor generation chamber 15. The film forming apparatus 100 includes the material supply unit 8 that additionally supplies the material P3 ′ to the accommodating portion 43 in a state where the P3 ′ material is evaporated. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111364007-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111364007-B |
| priorityDate | 2014-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.