http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016039476-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 |
| filingDate | 2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baf7f68503937c96a6cafef2f8a44ffb |
| publicationDate | 2016-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016039476-A |
| titleOfInvention | Capacitance type transducer and manufacturing method thereof |
| abstract | A technology capable of controlling a cell diameter of a capacitive transducer with high accuracy and realizing a structure in which a step between the connection portion and a cell diaphragm is suppressed even when an intercell connection portion is formed. provide. A capacitive transducer includes a plurality of cells each having a structure including a first electrode and a vibrating membrane including a second electrode with a gap therebetween. It is formed using a substrate in which a first layer including a portion to be a first electrode, a second layer including a portion to be etched to form a gap, and a third layer including a portion of a vibration film are stacked. The connecting portions 118 and 119 connected to the cell and the groove 122 defining the cell are formed up to the third layer 115, and the supporting portion for supporting the diaphragm and the connecting portion on the side wall of the groove on the cell and connecting portion side. An insulating film 112 is formed. The gap 109 is formed by etching the second layer, and the connection portion and the cell are connected so as to include the third layer in common. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109643378-A |
| priorityDate | 2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.