http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035569-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-06 |
filingDate | 2015-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb1839c842dea679d210afc09fbad701 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016035569-A |
titleOfInvention | Resist composition |
abstract | To provide a resist composition capable of forming a resist pattern having a good pattern shape and mask error factor. A resin (A1) containing a structural unit represented by formula (II) and a structural unit having an acid labile group, and an acid generator (Ba) containing an anion having 3 to 18 fluorine atoms, Containing a resist composition. [In the formula (II), R 2 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom, and X 1 represents a single bond, —CO—O— * or —CO—NR 4 — *. * Represents a bond with -Ar, R 4 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and Ar represents one or more groups selected from the group consisting of a hydroxy group and a carboxyl group. Represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7153478-B2 |
priorityDate | 2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 240.