http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035486-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-51 |
| filingDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c8147ee219546c1f8af1f282bbb42dd |
| publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016035486-A |
| titleOfInvention | Wavelength tunable optical filter, optical module, and electronic device |
| abstract | Provided is a wavelength tunable optical filter capable of suppressing relative inclination between a first reflecting surface and a second reflecting surface which face each other. A fixed substrate 14 having a first reflecting surface 33a and a first wiring 34, and a movable substrate 13 having a second reflecting surface 37a and a second wiring 44 facing the first reflecting surface 33a, are movable. The substrate 13 includes a movable portion 13b on which the second reflecting surface 37a is installed, a plurality of beam portions 36 that support the movable portion 13b, and a frame portion 13c that is connected to the beam portions 36. The first wiring 34 The second wiring 44 is connected by the first conductive film terminal 32 and the second conductive film terminal 42, and the first connection place 57 and the second connection place 58 where the beam part 36 and the frame part 13 c are connected and the first conductivity. Between the membrane terminal 32 and the second conductive film terminal 42, a fixing portion 56 that fixes the fixing substrate 14 and the frame portion 13c is located. [Selection] Figure 5 |
| priorityDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.