http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016034884-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8aa118fbfa85a6e0cc8c13a8afca19ab |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22 |
filingDate | 2014-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b01c8ee0272edaa215746a4a592af1d5 |
publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016034884-A |
titleOfInvention | Method for producing glass film laminate and method for producing electronic device |
abstract | It is an object of the present invention to facilitate the peeling of a glass film from a glass film laminate after a device manufacturing-related process involving heating. The manufacturing process S1 of the glass film laminate 1 includes the glass film 2 in the glass film laminate 1 before the lamination step S1b in which the glass film 2 is laminated on the supporting glass 3 to form the glass film laminate 1. And a plasma processing step S1a for plasma processing at least one of the opposing surfaces of the support glass 3. [Selection] Figure 2 |
priorityDate | 2014-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.