| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464fe8a56d48e8e24dcf7bbfeaf31f97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cd060bc4a3d9ce9aba67e94c46a132b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73318a510569d301679166a828cb6450 |
| publicationDate |
2016-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016034043-A |
| titleOfInvention |
Semiconductor device manufacturing method, substrate processing apparatus, program, and recording medium |
| abstract |
PROBLEM TO BE SOLVED: To improve controllability of a composition in a film when forming a film containing a predetermined element, carbon and nitrogen. A step of supplying a first processing gas containing a predetermined element and a halogen element to a substrate, and a second processing gas composed of three elements of carbon, nitrogen and hydrogen to the substrate are supplied. And a step of forming a film containing a predetermined element, carbon and nitrogen on the substrate by performing a cycle including a step of supplying a third processing gas containing carbon to the substrate a predetermined number of times. Have. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017168600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108807142-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108807142-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017168600-A1 |
| priorityDate |
2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |