| abstract |
The present invention provides a solid particle recovery / removal device that is space-saving and can reduce processing time, a liquid management device including the device, and an etching liquid management device. A cylindrical casing 35, a central shaft 36a provided in the casing 35, a screw blade 36b provided in a spiral shape near the inner wall of the casing 35 around the central shaft 36a, An inlet for supplying a liquid containing solid particles and a discharge outlet for discharging the solid particles; and a solid particle discharge pipe for discharging the solid particles from the casing. The solid particle discharge pipe is provided above the inlet and the outlet. The casing 35 is disposed at a predetermined angle, and the motor 37 rotates the screw blades 36b to convey the solid particles in the liquid from the liquid in the casing 35 to the solid particle discharge pipe. To discharge. [Selection] Figure 1 |