http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016027105-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e55123d5571098724399bf3c7a1f005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1490f280b78d66f5208cfe2bd43e92d2 |
| publicationDate | 2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016027105-A |
| titleOfInvention | Abrasive grains and manufacturing method thereof, slurry manufacturing method, polishing liquid and manufacturing method thereof, and polishing method |
| abstract | Provided is a method for producing abrasive grains in which the content of coarse particles is suppressed and a sufficient polishing rate of an insulating material can be obtained. A step of mixing a metal element salt, a first base precursor, and water to obtain an aqueous solution, and converting the first base precursor into the first base in the aqueous solution. The manufacturing method of an abrasive grain including the conversion process and the heating process which heats the liquid obtained at the said conversion process. [Selection figure] None |
| priorityDate | 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.