http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016025321-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6fc8bbba7dbfdc1fe42f350fc84e17a3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2014-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6d3c7b005f13a78c1b10f3e49e3631b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a9150bf6fae9d0f93983e6dd7eeda04 |
| publicationDate | 2016-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016025321-A |
| titleOfInvention | Etching solution composition and etching method |
| abstract | Ti of a metal laminated film including a Ti-containing layer made of Ti or an alloy containing Ti as a main component, an Al-containing layer made of Al or an alloy containing Al as a main component, and a metal oxide layer containing In. An etching solution composition capable of collectively etching an Al-containing layer and an Al-containing layer, and capable of reducing damage to a metal oxide layer containing In during etching, and an etching method using the same provide. An etching solution composition of the present invention includes a Ti-containing layer made of Ti or an alloy containing Ti as a main component, an Al-containing layer made of Al or an alloy containing Al as a main component, and a metal oxide containing In. An etching solution composition for collectively etching a Ti-containing layer and an Al-containing layer of a metal laminated film including a physical layer, comprising a fluorine compound, phosphorus oxoacid, metal salt, organic solvent, ammonium salt and It includes one or more selected from the group consisting of quaternary ammonium compounds and is acidic. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017174975-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10787628-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114231288-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112551909-A |
| priorityDate | 2014-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 433.