http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016009128-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-24 |
filingDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24ed4c4b51484cc4d61088e6f9844266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77141942773d7111cd6a6c9bd6f46df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b61fb1219b6bedfe5ba0f57f6bbdbd6 |
publicationDate | 2016-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016009128-A |
titleOfInvention | Resist composition, resist pattern forming method, and polymer compound |
abstract | Provided are a resist composition, a resist pattern forming method, and a polymer compound, which can form a resist pattern having a good shape and have excellent lithography properties. A resist composition that generates an acid upon exposure and changes its solubility in a developing solution by the action of an acid, comprising a polymer compound (X), wherein the polymer compound (X) comprises: It includes a structural unit (Xs) represented by the following general formula (Xs-01) and a structural unit (Xp) represented by the following general formula (Xp-01) (wherein Ra 01 is an organic group having a fluorine atom) , Ra 02 is a cyclic ether-containing group which may have a substituent. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023026842-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022190714-A1 |
priorityDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 206.