http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016004961-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f56b5174f7d196258707ccf1d609796e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14632 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14 |
| filingDate | 2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86d038c1668e50a05371a5b39149d484 |
| publicationDate | 2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016004961-A |
| titleOfInvention | Imaging device and manufacturing method thereof |
| abstract | In an imaging device including a waveguide, surface roughness of an insulating film covering a seal ring portion is prevented. A pixel region PE, a peripheral circuit region PC, and a seal ring region SR are defined on a semiconductor substrate SUB. After the pad electrode PD is formed in the peripheral circuit region PC and the seal ring SRPD is formed in the seal ring region SR, the TEOS film TE2 is formed so as to cover the pad electrode PD and the seal ring SRPD. A photoresist pattern is formed to expose portions of the TEOS film TE2 that respectively cover the pad electrode PD and the seal ring SRPD, and the exposed TEOS film TE2 is etched. Next, after the pattern of the photoresist RP12 is formed, an etching process is performed to form the second waveguide opening WGH2 in the pixel region PE. [Selection] Figure 43 |
| priorityDate | 2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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