http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015536037-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10152 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N23-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0633 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2013-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015536037-A |
| titleOfInvention | Method and device for controllably revealing an object, eg a structure buried in a wafer |
| abstract | An imaging sensor (22), optical imaging means (34) capable of generating an image (73, 74) of an object (20) in the field of view on said imaging sensor (22), and an illumination beam (25, 30) The structure (70a) enclosed in the object (20) on the surface of the object (20), for example, the wafer, using illumination means (23, 27) for illuminating the field of view during generation and reflection 70b, 70c) Imaging methods and devices, for example for inspecting vias, in which the spectral components are such that the light of the beam (25, 30) can penetrate essentially into the object (20) A first image (73) of the object (20) is taken by illuminating the object (20) with a first illumination beam (25, 30) adapted to the properties of (20). And a second illumination beam (25) whose spectral components are adapted to the properties of the object (20) such that the light of the beam (25, 30) is substantially reflected by the surface of the object (20). , 30) to illuminate the object (20) to obtain a second image (74) of the object (20) and a second image that is visible in the first image (73). Comparing the first image and the second image (73, 74) to identify structures (71a) that are not visible in (74). About. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022114850-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7134509-B2 |
| priorityDate | 2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.