| abstract |
Various cycloolefin / maleic anhydride polymers having maleimide pendant groups and compositions useful for forming self-developed films comprising such copolymers are disclosed. Such a polymer includes a norbornene-type repeating unit having a maleimide group and a maleic anhydride-type repeating unit, and at least some of the maleic anhydride-type repeating units are opened. Films formed from such copolymer compositions provide a low-k, thermally stable self-developed layer for use in microelectronic and optoelectronic devices. |