| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2013-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015530742-A |
| titleOfInvention |
Flowable carbon for semiconductor processing |
| abstract |
A method of forming a flowable carbon layer on a semiconductor substrate is described. Local excitation (such as hot filament in hot wire CVD, plasma in PECVD or UV light) includes hydrocarbons to form a flowable carbon-containing film on the substrate, as described herein. It can be applied to silicon-free carbon-containing precursors. Remote excitation produces a flowable carbon-containing film by exciting a stable precursor to produce a radical precursor, which is then combined with a non-excited silicon-free carbon-containing precursor in the substrate processing region. It has been found further. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10651044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180099565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699614-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180099476-A |
| priorityDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |