http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015525483-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2013-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015525483-A |
| titleOfInvention | Compositions and methods for polishing molybdenum |
| abstract | The present invention provides compositions and methods for polishing molybdenum metal-containing surfaces. The polishing compositions (slurries) described herein are abrasive particulate inorganic abrasives (eg, alumina or silica) suspended in an acidic aqueous medium containing a water soluble surfactant and an oxidizing agent. ) Is included. The surfactant includes a cationic material if the abrasive has a positive zeta potential, and the anionic agent if the particulate abrasive has a negative zeta potential. It is selected based on the zeta potential of the particulate abrasive to include a material, a nonionic material, or a combination thereof. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023085008-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023085007-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023085009-A1 |
| priorityDate | 2012-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.