| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1611 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-84 |
| filingDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015524080-A |
| titleOfInvention |
Solid state laser and inspection system using 193nm laser |
| abstract |
The improved laser system and related techniques generate an ultraviolet (UV) wavelength of about 193.368 nm from a fundamental vacuum wavelength close to 1064 nm. Preferred embodiments divide the unconsumed portion of the input wavelength into at least one stage and redirect the unconsumed portion for use in another stage. The improved laser system and associated technology results in a cheaper and longer life laser than that currently used in the industry. These laser systems are readily available and can be constructed with relatively inexpensive parts. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017139344-A |
| priorityDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |