| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-8554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-257 |
| filingDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67f797060bb93a0dbc2b8501289fb63 |
| publicationDate |
2015-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015225957-A |
| titleOfInvention |
ELECTRO-MECHANICAL CONVERSION ELEMENT, ELECTRO-MECHANICAL CONVERSION ELEMENT MANUFACTURING METHOD, DROPLET DISCHARGE HEAD, DROPLET DISCHARGE DEVICE |
| abstract |
An electro-mechanical conversion element capable of reliably ensuring a sufficient amount of displacement taking into account plate restraint and sufficient ink discharge characteristics to be exhibited. A lower electrode formed on a substrate, an electro-mechanical conversion film having a perovskite crystal including lead zirconate titanate (PZT) formed on the lower electrode, and an electro-mechanical film. The electro-mechanical conversion element 20 includes an upper electrode 25 formed on the conversion film, and the electro-mechanical conversion film 24 is (200) of the electro-mechanical conversion film 24 in a state where the substrate 21 is not restrained. ) X-ray diffraction peak position derived from the plane is 2θ = 44.45 ° or more and 44.75 ° or less, and the diffraction peak derived from the (200) plane or the (400) plane has asymmetry. . [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017130624-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7167626-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023042704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017123403-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10160208-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9956774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019161213-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017112281-A |
| priorityDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |