http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015222828-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86ff778280a8f314c5732fead5868411 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 |
| filingDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b7223d7fbc83e66bad29f86042b7c6e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a8cfa1d0457e7ae041cc23cac84783f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21b783bef6d6d2761d2d6a9bc6ec13d8 |
| publicationDate | 2015-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015222828-A |
| titleOfInvention | Nitride semiconductor light emitting device |
| abstract | A flip-chip mounting nitride semiconductor light-emitting element having a thick metal bump and high reliability, and a manufacturing method thereof with improved productivity are provided. A nitride semiconductor light emitting device 1 masks a first resist pattern 30 having openings 30a and 30b on an n-side electrode connection surface 10a and a p-side electrode connection surface 10b of a nitride semiconductor light-emitting device structure 10. After removing the protective layer 20, the first metal layer 25 to be the n-side electrode 21 and the p-side electrode 22 is formed without removing the first resist pattern 30. Subsequently, the second resist pattern 31 having the openings 31a and 31b is formed on the openings 30a and 30b without removing the first resist pattern 30, and the metal is formed by electrolytic plating using the first metal layer 25 as an electrode. Second metal layers 26a and 26b to be the bumps 23 and 24 are formed. Thereafter, the second resist pattern 31 and the second resist pattern 32 are removed. [Selection] Figure 4 |
| priorityDate | 2011-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.