http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015210517-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-10 |
| filingDate | 2014-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea66f638c7bcf4bd769f44650f60a34a |
| publicationDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015210517-A |
| titleOfInvention | Pattern drawing apparatus, pattern drawing method, and device manufacturing method |
| abstract | A pattern drawing apparatus and a pattern drawing method that reduce costs even when each of a plurality of divided laser beams is scanned and the intensity is modulated to draw a pattern on an irradiated object And a device manufacturing method using the pattern drawing method. A pattern on an irradiated object is obtained by performing relative scanning between the spot light and the irradiated object while intensity-modulating the spot light of the ultraviolet laser beam condensed on the irradiated object according to the drawing data. Is a pattern drawing apparatus for drawing a light source unit that generates seed light that is the source of ultraviolet laser light, an optical amplifier that receives and amplifies the seed light, and generates ultraviolet laser light from the amplified seed light. A laser light source device including a wavelength conversion optical element, and a drawing modulation device that modulates the intensity of seed light generated from the light source unit according to drawing data in order to modulate the intensity of the spot light. [Selection] Figure 17 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10642168-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018060001-A |
| priorityDate | 2014-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.