http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015204185-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dca153f19868f747eeea612b047a9e7c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate | 2014-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf5e2fba2d0b58e53526f26a340dc791 |
| publicationDate | 2015-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015204185-A |
| titleOfInvention | Microwave ion source and shield member used therefor |
| abstract | Deposits generated in a plasma chamber of a microwave ion source are reduced. A microwave ion source (10) includes a microwave introduction window (16) for introducing a microwave into an internal space (12) of a plasma chamber (11) in an axial direction, and a sidewall extending in the axial direction so as to surround the internal space (12). 15, a plasma chamber 11 including an ion extraction opening 17 provided at a position facing the microwave introduction window 16 in the axial direction, a liner 20 provided along the side wall 15 in the internal space 12, and the internal space 12 A shield member 60 provided inside the liner 20 and partitioning the internal space 12 into a plasma generation space 12a and a microwave shielding space 12b located outside the plasma generation space 12a. The shield member 60 has a plurality of small holes 63 that allow the plasma generation space 12a and the microwave shielding space 12b to communicate with each other. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111902904-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111902904-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7313422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018147821-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021519507-A |
| priorityDate | 2014-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.