http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015200719-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
| filingDate | 2014-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670728824132ce71b207aa72751eca6b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2644ad07440e9affc58ea0d231c559b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_345c81e9c29ead53f774d78adea9ac8c |
| publicationDate | 2015-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015200719-A |
| titleOfInvention | Phase shift mask and manufacturing method thereof |
| abstract | A phase shift mask capable of suppressing film loss of a developed resist layer corresponding to a phase shift region when exposed using mixed wavelength exposure light including i-line, h-line, and g-line The main purpose is to provide A phase shift comprising a transparent substrate, a phase shift film formed on the transparent substrate, a transmission region where the transparent substrate is exposed, and a phase shift region provided with the phase shift film. The phase shift region is a mask that reverses the phase of the g-line that has passed through the phase shift region, and the i-line transmittance of the phase shift region is the amount of photosensitive energy of the i-line of the resist layer. The above problem is solved by providing a phase shift mask having a transmittance equal to or less than a threshold value and having a g-line transmittance higher than the i-line transmittance. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018106023-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017015863-A |
| priorityDate | 2014-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.