http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015195290-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c941886b9985239ea27c05048283a01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9049dfac3484e7f4968b72f379ae3c8 |
| publicationDate | 2015-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015195290-A |
| titleOfInvention | Defect detection method for heterogeneous SOI substrates with oxide films |
| abstract | Provided is a defect detection method for a heterogeneous SOI substrate with an oxide film, which can be easily detected without increasing defects. A heterogeneous SOI substrate including a semiconductor thin film of a material different from that of the base substrate is heat-treated in the presence of oxygen on the base substrate, and an oxide film is formed on the surface of the semiconductor thin film and defects extending inward from the surface of the semiconductor thin film. A step of etching and a heterogeneous SOI substrate on which an oxide film is formed, using a hydrofluoric acid-containing solution having different etching rates, and etching the oxide film on the surface of the semiconductor thin film at least twice. A step of removing an oxide film inside the semiconductor thin film, a step of heat-treating the etched heterogeneous SOI substrate in the presence of oxygen to form an oxide film on the etched surface of the semiconductor thin film, and an oxide film A step of observing a defect on the surface of the semiconductor thin film of the formed heterogeneous SOI substrate with a pattern defect detection apparatus; Method of detecting defects I substrate. [Selection figure] None |
| priorityDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.