| abstract |
Provided is a micropump and microvalve drive device that can easily control the pump volume and has little loss. A micropump 50a that operates by expansion and contraction of a first shape memory alloy wire 5a, a wiring portion 6a parallel to the first shape memory alloy wire, and a state in which only the first shape memory alloy wire is energized and in the wiring portion A pump drive unit 7a having a first changeover switch unit 4a for selecting a state of energization, a micro valve 51a that operates by expansion and contraction of a plurality of second shape memory alloy wires 9a, and a plurality of second shape memory alloys A valve drive unit 10a having a second changeover switch unit 8a for energizing any one of the wires, a switch unit 3, a valve control unit 11a for controlling the second changeover switch unit and the switch unit, And a pump control unit 12a for controlling a period during which only the first shape memory alloy wire is energized when the switch unit is on. [Selection] Figure 1 |