http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015145818-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F38-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01T2-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2014-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a575bc42f04ba7e3de339cb3c9d91d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9d0c571792805c732b1767fa1915f56 |
| publicationDate | 2015-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015145818-A |
| titleOfInvention | Inspection apparatus and inspection method for semiconductor device |
| abstract | Disclosed is a low-cost inspection device and inspection method for a semiconductor device, which has a small deviation voltage of a discharge voltage and can inspect a surge voltage tolerance with high accuracy. An inspection apparatus (100) includes a first main electrode (17), a second main electrode (19), an auxiliary electrode (20), a suction device (21), and a radius of curvature r1 of a spherical surface at the tip of each main electrode (17, 19, 21). By setting the positional relationship between r2, r3 and each main electrode to a predetermined value, the deviation voltage of the discharge voltage is small, and a low-cost semiconductor device inspection device capable of inspecting the surge voltage tolerance with high accuracy and its An inspection method can be provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108181512-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108181512-A |
| priorityDate | 2014-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451814683 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6433164 |
Total number of triples: 17.