http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015127365-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00 |
filingDate | 2013-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21364f1fab1cd2b90456c96e3fc39a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6183b7e26ebc061621b2e2698753aa85 |
publicationDate | 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2015127365-A |
titleOfInvention | Method for producing polishing composition |
abstract | [PROBLEMS] To efficiently remove coarse particles and gelled material in a silica dispersion to be treated containing colloidal silica in a polishing process of a substrate surface, thereby providing high filtration accuracy and improving the surface of the substrate after polishing. Provided is a method for producing a polishing composition, which can reduce the number of scratches. The method includes a step of filtering a treated silica dispersion containing colloidal silica with a filter containing a filter aid, wherein the average particle size of primary particles determined by the colloidal silica titration method is 1 nm or more and 50 nm or less. A method for producing a polishing composition, wherein the filter aid has an iron content of less than 0.38% by mass. As the filter aid, diatomaceous earth is preferable, and the content of aluminum in the filter aid is preferably less than 0.68% by mass. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017065797-A |
priorityDate | 2013-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 227.