http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015126059-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 |
| filingDate | 2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81e1d8aa965eaccc194716491a027932 |
| publicationDate | 2015-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015126059-A |
| titleOfInvention | Piezoelectric actuator, method for manufacturing piezoelectric actuator, droplet discharge head, liquid cartridge, and image forming apparatus |
| abstract | There is provided a piezoelectric actuator that prevents deterioration of piezoelectric characteristics due to an excessive lead component. A diaphragm, a lower electrode provided on the diaphragm, and a piezoelectric thin film formed by laminating a plurality of piezoelectric layers containing lead, zirconium, and titanium provided on the lower electrode; A piezoelectric actuator 10 including an upper electrode 17 provided on a piezoelectric thin film, in which a titanium oxide film 18 is formed on a vibration plate, a platinum film 15a formed on the titanium oxide film 18, and a platinum The lower electrode 15 having the titanium oxide film 15b formed on the film 15a is formed, and the lead content of the first piezoelectric layer stacked on the lower electrode among the plurality of piezoelectric layers 16 is The lead content of the piezoelectric layer other than the first layer is higher. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017074751-A |
| priorityDate | 2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.