http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015122418-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49308e8718b2bc5be941bc5b7a1d2443 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-297 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58 |
| filingDate | 2013-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_008b076abd7ba72a6bca832afbb31b88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe6b06e7cf0cad4b81e76cf6678b74a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86c6511eaaf495b442d45b5155ccc59a |
| publicationDate | 2015-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015122418-A |
| titleOfInvention | Piezoelectric element, method for manufacturing piezoelectric element, and vapor deposition apparatus |
| abstract | 【Task】 An object of the present invention is to provide a piezoelectric element having excellent withstand voltage characteristics. [Solution] The piezoelectric element is disposed on the support substrate, the first electrode is disposed on the first electrode, and is formed discontinuously with the first piezoelectric thin film and the first piezoelectric thin film. The first piezoelectric thin film includes a first lead compound layer and a first lead compound layer that longitudinally cuts in the thickness direction in the first lead compound layer. The second piezoelectric thin film is not continuous with the second lead compound layer and the first lead conductor, and the inside of the second lead compound layer is in the thickness direction. A piezoelectric layer including a second lead conductor longitudinally cut and a second electrode disposed on the piezoelectric layer. [Selection] Figure 3 |
| priorityDate | 2013-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.