http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015099072-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76f595ac54dedcd4462857c633360f85 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-215 |
| filingDate | 2013-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_489611d407364a5ce685de1229694164 |
| publicationDate | 2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015099072-A |
| titleOfInvention | Piezoelectric sensor and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To provide a piezoelectric sensor having a simple structure and a small size and easy to manufacture while having a structure capable of obtaining a large signal, and a manufacturing method thereof. A piezoelectric sensor 10 includes vibration arm portions 11a and 11b and detection arm portions 12a and 12b, and operates as an angular velocity sensor. The vibrating arms 11a and 11b bend and vibrate in the x direction, which is the polarization direction, by the voltage Vin, and bend and vibrate in the z direction perpendicular to the x direction by the external force Fc. The detection arm portions 12a and 12b are provided on the vibrating arm portions 11a and 11b, respectively, flexurally vibrate together with the vibrating arm portions 11a and 11b, have a polarization direction along the z direction, and generate a voltage Vout by bending vibration in the z direction. Occur. [Selection] Figure 1 |
| priorityDate | 2013-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.