http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015096472-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D493-08 |
| filingDate | 2013-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_015e122836d68cb67b160d937bd68084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b172b64d585d3efbadb3b28de2bb8bb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a596adfe539e976ad81bee6aa1569911 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4bc447f7870ba8d3b86741084475bba |
| publicationDate | 2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015096472-A |
| titleOfInvention | Process for producing acrylate derivative, intermediate and process for producing the same |
| abstract | Kind Code: A1 A novel method for producing an acrylic ester derivative capable of forming a high-resolution resist pattern having excellent lithographic properties such as LWR when it is one of the constituent units of a polymer compound contained in a photoresist composition. To provide. Furthermore, the present invention provides an intermediate of the acrylate derivative and a production method thereof. The following general formula (1) (In the formula, A represents a —C (═O) —O— containing cyclic group, a —SO 2 — containing cyclic group, a —O—C (═O) —O— containing cyclic group, —NR 14 —. An SO 2 -containing cyclic group or an —NR 14 —C (═O) -containing cyclic group, W represents an alkylene group or a cycloalkylene group, and X 1 contains an oxygen atom or a sulfur atom, or An alkylene group, an oxygen atom or a sulfur atom not contained, X 2 represents a halogen atom), a method for producing the haloester derivative, and an acrylate derivative using the haloester derivative. Production method. [Selection figure] None |
| priorityDate | 2013-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 136.