| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_475172db03c0936270ded309fbacf53f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e4227e2e15eca4898be4b64c13740ad |
| publicationDate |
2015-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015095414-A |
| titleOfInvention |
Ion generating apparatus and ion generating method |
| abstract |
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a highly productive ion production technique that reduces contamination of heavy metal ions during ion implantation. An ion generation apparatus includes an arc chamber made of a material containing at least a part of carbon, a thermoelectron emission unit that emits thermoelectrons into the arc chamber, and a source within the arc chamber. A gas inlet 24 for introducing gas and cogas. The source gas introduced into the arc chamber contains a halide gas, and the cogas introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019525381-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019525382-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018185987-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6375470-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112017007408-T5
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020522838-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190002721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7033086-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016225139-A |
| priorityDate |
2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |