http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015092556-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78648 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 2014-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 |
| publicationDate | 2015-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015092556-A |
| titleOfInvention | Semiconductor device |
| abstract | In a semiconductor device using an oxide semiconductor film, defects in the oxide semiconductor film are reduced. In addition, electrical characteristics are improved in a semiconductor device including an oxide semiconductor film. In addition, reliability of a semiconductor device using an oxide semiconductor film is improved. An oxide semiconductor layer, and a pair of electrodes in contact with the oxide semiconductor layer and containing copper, aluminum, gold, or silver, the oxide semiconductor layer including a first oxide semiconductor layer, A second oxide semiconductor layer having a stacked structure of a second oxide semiconductor layer and a third oxide semiconductor layer located between the first oxide semiconductor layer and the second oxide semiconductor layer; The semiconductor layer has a plurality of crystal parts, the plurality of crystal parts have c-axis orientation, and the c-axis faces a direction parallel to the normal vector of the upper surface of the second oxide semiconductor layer. A semiconductor device is provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022008342-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11537019-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10591791-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017051361-A |
| priorityDate | 2013-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.