| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05569
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05147 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-89 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0aa1485acfb57aef7a2fefbabad37326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b0e9b1303c5345b5341aef14d8a6dce |
| publicationDate |
2015-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015079901-A |
| titleOfInvention |
Semiconductor device and manufacturing method of semiconductor device |
| abstract |
A semiconductor device manufacturing method capable of easily improving electrical characteristics and reliability of a semiconductor device, and a semiconductor device manufactured by the manufacturing method are provided. A semiconductor device according to an embodiment includes a first semiconductor member, a second semiconductor member, and a first barrier film. The first semiconductor member includes a first insulating film and a first wiring film embedded in the first insulating film and having a surface exposed from the first insulating film. The second semiconductor member includes a second insulating film and a second wiring film embedded in the second insulating film and having a surface exposed from the second insulating film. The first barrier film is formed in a region where the first wiring film and the second insulating film are in contact with each other in the bonding interface where the first semiconductor member and the second semiconductor member are bonded to each other. It is formed of a compound with a predetermined element contained in the film. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019515511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020043120-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022528073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742374-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10332927-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016190059-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020071103-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776923-B2 |
| priorityDate |
2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |