http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015079863-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2560bf1355cda371aaedb89710f51d1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c31985dc027b94ca8305b5e1a02f6d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abe2a221dc3386883dec00b412e0e0c7 |
| publicationDate | 2015-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015079863-A |
| titleOfInvention | Method for producing electrode pattern made of conductive silicone rubber, all-silicone rubber electrostatic chuck and method for producing the same |
| abstract | A method for producing a conductive silicone rubber electrode pattern capable of processing a fine electrode pattern shape with a conductive silicone rubber, and embedding the conductive silicone rubber electrode pattern in an insulating silicone rubber. An all-silicone rubber electrostatic chuck and a method for producing the same are provided. A conductive silicone rubber composition is formed into a sheet and laminated with a process film, and then the conductive silicone rubber composition sheet is cured, and only the conductive silicone rubber sheet is formed into an electrode pattern without cutting the process film. A method for producing an electrode pattern made of conductive silicone rubber, wherein an excess conductive silicone rubber sheet is peeled off from the process film and then removed. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018530078-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017220557-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019117924-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020537352-A |
| priorityDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.