Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00 |
filingDate |
2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c73d832f83b05a2bba1832f671c118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b9845da719074d94bccfec34444a3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3819fea49b4ed518c3e8d34f44c8a159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cddc04496099dcfa4d5d8e00fc5fbd3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c64bf1e627002819df6a4a811220b667 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c50263ed94ea8a9aec6f6b4c0b1334a |
publicationDate |
2015-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2015070054-A |
titleOfInvention |
Method for producing structure containing phase-separated structure and block copolymer composition |
abstract |
A method for producing a structure including a phase separation structure, a phase separation structure, and a block copolymer composition are provided. A step of applying a neutralization film on a substrate to form a layer made of the neutralization film, and a plurality of types of block copolymers having different periods on the layer made of the neutralization film. A method for producing a structure including a phase separation structure, comprising: a step of forming a layer containing a mixture of: and a step of phase-separating the layer containing a mixture of the block copolymer. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020500961-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10934426-B2 |
priorityDate |
2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |