http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015050443-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_884b296e7f1c580c4586fd8872fe5b48 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2013-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f7da3c71df68e11a600e8941ba6de1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ccbcdf0ee42dac5ccb1cdfe3bfa5508 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9719367cffc6c69c50050b837fc3654e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc418d5bc805f61265a9f25bbd0e327e |
| publicationDate | 2015-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015050443-A |
| titleOfInvention | Microstructure transfer device |
| abstract | 【Task】 Provided is a fine structure transfer apparatus capable of transferring without damaging a stamper with a simple structure. [Solution] A stamper holding jig 4 for holding a stamper 1 having a pattern surface on which a fine structure pattern is formed, and a transferred body in which a resin 2 is applied to the surface of the substrate 3 are mounted. And a lift stage 9 that is movable relative to the stamper holding jig 4 and a pressing member 10 that is disposed on the opposite side of the pattern surface of the stamper 1 and has a curved surface that protrudes toward the stamper 1. 1 is brought into contact with the resin applied to the surface of the substrate 3 in a state of being bent following the curved surface of the pressing member 10 to perform pattern transfer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108475622-A |
| priorityDate | 2013-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.