http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015042750-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F246-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2014-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2015-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015042750-A |
| titleOfInvention | Resin, resist composition and pattern forming method |
| abstract | An object of the present invention is to improve the shape and focus margin by using this resin in a resist composition. A resin containing a structural unit derived from a compound represented by formula (I), wherein the structural unit is contained in an amount of 5 to 10 mol% in all the structural units of the resin. [In the formula (I), R1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom; X1 represents a heterocyclic ring having 2 to 36 carbon atoms; The hydrogen atom contained in is substituted with a halogen atom, a hydroxyl group, a hydrocarbon group having 1 to 24 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an acyl group having 2 to 4 carbon atoms, or an acyloxy group having 2 to 4 carbon atoms. -CH2- contained in the heterocyclic ring may be replaced by -CO- or -O-. ] [Selection figure] None |
| priorityDate | 2009-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 319.