| abstract |
A sintered body capable of forming an amorphous zinc oxide-tin oxide based transparent conductive film and a method for producing the same are provided. ZnO powder, SnO2 powder and In2O3 powder as raw material oxide powders are put into a bead mill, and a slurry obtained by mixing for 24 hours is dried by a spray drying apparatus at 100 ° C. to obtain a dry powder (average) Particle size 1.5 μm). The obtained mixed and dried powder was filled into a rubber mold, and pressure-molded with a CIP device at 2600 kg / cm 2 to prepare a molded body. While the molded body was desolvated at 400 ° C. and air was introduced at a flow rate of 500 ml / min, the first stage sintering was performed at a sintering temperature of 1100 ° C., atmospheric pressure, holding time of 2 hours, and then the temperature was further increased. Then, the second stage of sintering is performed at a sintering temperature of 1300 ° C., atmospheric pressure, and holding time of 10 hours to produce a sintered body, containing indium, zinc and tin, and indium oxide in which zinc and tin are dissolved. An oxide sintered body containing a phase is obtained. [Selection] Figure 1 |