http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015034244-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c97f90ab12b35b650d5fd039ed7a41a5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f841cb087f101c39a2a0660e5fc2a1ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c764d138076b9266abe0dd83bb7c2cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a543aa64541674bfb1e128463be94baa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5fa5e8b9addc18d99141a7bbb48d99 |
| publicationDate | 2015-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015034244-A |
| titleOfInvention | Polishing liquid for CMP |
| abstract | An object of the present invention is to provide a polishing slurry for CMP that suppresses the generation of polishing flaws on a surface to be polished, has a high polishing rate, and is excellent in dispersion stability. A polishing slurry for CMP includes abrasive particles and water in which abrasive particles and cationic organic polymer particles are aggregated via an anionic water-soluble polymer compound, and the abrasive particles include: It is spherical and contains at least cerium, and the total content of each element of cerium, lanthanum, praseodymium, neodymium, samarium and europium is 81 mol% or more based on the total amount of rare earth elements contained in the abrasive particles. And the total content of each element of yttrium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium and lutetium is 19 mol% or less with respect to the entire rare earth element contained in the abrasive particles. It is characterized by being. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019193693-A1 |
| priorityDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 162.