abstract |
A method for producing a structure including a phase separation structure, a phase separation structure, and a block copolymer composition are provided. A step of applying a neutralization film 2 on a substrate 1 to form a layer made of the neutralization film 2, and a plurality of types of polymers on the layer made of the neutralization film 2. Coating a block copolymer 3 having a weight average molecular weight of 150,000 or more bonded to each other, forming a layer containing the block copolymer 3 having a coating film thickness of 23 nm or less, and phase separation of the layer containing the block copolymer 3 And a manufacturing method of a structure including a phase separation structure. [Selection] Figure 1 |