http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015028917-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-105 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-14 |
filingDate | 2014-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57dc39e7fdce241021d6809ef80e4d9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca020242309e399716e19ff4b2a9b5b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c848116c95ced63c3a5b2061b08dac04 |
publicationDate | 2015-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2015028917-A |
titleOfInvention | Ion group irradiation apparatus, secondary ion mass spectrometer, and secondary ion mass spectrometry method |
abstract | An ion group irradiation apparatus for acquiring a secondary ion mass spectrum or mass distribution image with sufficient intensity in a short time is provided. In an ion group irradiation apparatus that irradiates a sample with an ion group, an ion source that generates ions, and an ion group selection unit that selects an ion group including cluster ions from ions emitted from the ion source; The ion source further includes a pressure gradient forming means for temporally changing the pressure at which the cluster ion raw material is injected, and the ion group selection means is configured to open and close the cluster ions. A chopper that performs a chopping operation for selecting and separating ions in the traveling direction, and the chopper performs two or more chopping operations per pressure gradient forming operation by the pressure gradient forming means. An ion group irradiation apparatus characterized by that. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017054737-A |
priorityDate | 2013-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.