http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015023122-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63cfce9636dcc04e12e15ea9b71f1a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf98b03c2f19f9789074f8ad62f2830 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79209daf1e029386f874e147c948ac1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_652121c0e2f02e00c1d15bb525d74253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ec5072a8a8361337d469d41367b408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6c3bcecbb3fbb7fd05e11c69d4d27a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd4d0ab397c215a0bf757ebff43c9de |
| publicationDate | 2015-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015023122-A |
| titleOfInvention | Polishing liquid, method for producing the same, and polishing method |
| abstract | In a CMP technique for polishing a film to be polished formed on the surface of a substrate, a polishing liquid is provided that has low dependence on wiring density and is excellent in surface flatness and over-polishing resistance after polishing. A cerium oxide particle, an acrylic acid polymer, an organic acid compound, a pH adjuster, and water are contained, and the acrylic polymer is selected from the group consisting of acrylic acid and methacrylic acid. A polymer obtained by polymerizing at least one monomer component, and the polymer has at least one selected from the group consisting of nitrate group, nitrate group, nitrite group and nitrite group as an end group. And a polishing liquid having a pH of 4.0 or more and 5.5 or less. [Selection] Figure 1 |
| priorityDate | 2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 380.