http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015023075-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f56b5174f7d196258707ccf1d609796e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate | 2013-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0844ca7a56306022d2a7859ae21c5df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c254e4b0754c1c6a22e25149800ba54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_320e7234c86a9ddcef83e408b1ddf8c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20824ab6a73109a07f0d31699b6ec7e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95573888e8f2c16e039db32e2d72452f |
| publicationDate | 2015-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015023075-A |
| titleOfInvention | Semiconductor integrated circuit device and manufacturing method thereof |
| abstract | The chip size of an eDRAM is reduced. A silicide block film on the source and drain of a selected MISFET is obtained by etching back a mask film MSK provided in a memory array area M of a DRAM in a state where a logic circuit area L is covered with a first mask PR6. The silicide block film SBL on the gate electrode G1 is selectively removed while leaving SBL. With the memory array region M covered with the second mask, the silicide block film SBL on the surface of the gate electrode G2 and the source and drain surfaces of the MISFET in the logic circuit region L is removed. Then, using this silicide block film SBL, silicide films are formed on the gate electrode G1 of the select MISFET, the gate electrode G2 of the MISFET in the logic circuit region L, and the source and drain of the MISFET in the logic circuit region L. [Selection] Figure 14 |
| priorityDate | 2013-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.