| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 |
| filingDate |
2013-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_136da8151a38d009aae89e7091642fc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_969664276c0643b24594a89561f30b32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4236fb57a00f2fa8e9b6a3756d841a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d96d7202afeeb9db6a6cd462b35f0153 |
| publicationDate |
2015-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015013791-A |
| titleOfInvention |
Periodic table group 13 metal nitride semiconductor crystal manufacturing method and periodic table group 13 metal nitride semiconductor crystal |
| abstract |
The present invention provides a method for producing a periodic table group 13 metal nitride semiconductor crystal capable of growing a crystal with good crystal quality and capable of suppressing the occurrence of cracks even when thick film growth is performed. Let it be an issue. In a method for producing a periodic table group 13 metal nitride semiconductor crystal, the method includes a growth step of growing a periodic table group 13 metal nitride semiconductor crystal on a main surface of a seed crystal by a liquid phase growth method. A curvature radius in a cross section perpendicular to the main surface of the seed crystal is set to 10 m or more. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10961619-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017159311-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019218263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108779580-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017159311-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11371140-B2 |
| priorityDate |
2013-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |