http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015002284-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0567f729610e08a08cdb5fd169ae1834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5780f980006f9a3dcc0c8abda77a7743 |
| publicationDate | 2015-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015002284-A |
| titleOfInvention | Etching solution composition and etching method |
| abstract | An object of the present invention is to etch a laminated film composed of a titanium-based film and a copper-based film in a batch, thereby obtaining a thin wire having a desired width and obtaining a thin wire having a preferable cross-sectional shape. The object is to provide a liquid composition and an etching method using the same. The present invention provides an etching solution composition for collectively etching a laminated film composed of a titanium-based film and a copper-based film, wherein (A) hydrogen peroxide: 0.1 to 15% by mass, (B) Fluoride ion source: 0.02 to 2% by mass, (C) Organic carboxylic acid: 5 to 60% by mass, and (D) Complex containing three or more double bonds including one or more azole compounds and nitrogen atoms It relates to an etching solution composition comprising an aqueous solution containing at least one compound selected from compounds having a 6-membered ring in the structure: 0.01 to 5% by mass. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111719157-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019179829-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7105084-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114891509-A |
| priorityDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.