http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015002238-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 |
| filingDate | 2013-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2853d9f298509b3366ed61ab7d7f09bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34acd95173c8b8b9e3f5fad7e5959bbd |
| publicationDate | 2015-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015002238-A |
| titleOfInvention | Ferroelectric film forming apparatus and ferroelectric film forming method |
| abstract | A ferroelectric film obtained by crystallizing a stack of amorphous films that have undergone different thermal histories by chemical solution deposition and heating them at high temperature ensures uniformity in the thickness direction and has good characteristics. Get a membrane. SOLUTION: A coating process in which a precursor liquid of a composite oxide is applied to form a precursor liquid coating film, and a drying / pyrolysis process in which the precursor liquid coating film is dried and thermally decomposed to form an amorphous film of the composite oxide. When a ferroelectric film is formed, a plurality of amorphous films are repeatedly stacked, and the amorphous film stack is heated to a high temperature to form a composite oxide crystal film. The peak of the particle size distribution of the solid content dispersed in the precursor liquid applied in the coating step is increased. [Selection] Figure 7 |
| priorityDate | 2013-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.