Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 |
filingDate |
2012-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2014-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2014507815-A |
titleOfInvention |
Novel etching composition |
abstract |
The present disclosure relates to an etching composition comprising at least one sulfonic acid, at least one compound comprising a halide anion, wherein the halide is chloride or bromide, at least one compound comprising a nitrate or nitrosyl ion, and water. . The at least one sulfonic acid is about 25% to about 95% by weight of the composition. The halide anion is chloride or bromide and is about 0.01% to about 0.5% by weight of the composition. The nitrate or nitrosyl ion is about 0.1% to about 20% by weight of the composition. The water is at least about 3% by weight of the composition. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190048724-A |
priorityDate |
2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |