http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014240988-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38dcd1650dba55489ed2a02a56f34637 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 2014-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb57022dddda119b462c556ec491bee |
| publicationDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014240988-A |
| titleOfInvention | Halftone blanks |
| abstract | PROBLEM TO BE SOLVED: To provide a halftone blank having a structure in which a halftone mask is easily protected and does not require a large capital investment, and a halftone film is sufficiently protected when a light shielding film is etched. SOLUTION: A semi-transmissive film 2, an etching stopper film 3, and a light shielding film 4 are sequentially formed on a transparent substrate 1, and the light shielding film 4 is formed of chromium or a chromium compound. The etching stopper film 3 is a film made of titanium oxynitride having a thickness of 2 nm or more so as to prevent the etching from proceeding to the semi-transmissive film 2 when the light shielding film is etched. [Selection] Figure 1 |
| priorityDate | 2014-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.