Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-101 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-06 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40 |
filingDate |
2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd6b9d0f9c4f086cca5768a6f099a6ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa096bba069e48b6f161e1af3f70bce9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b1e95fccb162030f43e04f2645e77d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9934d76f5c383f53db84f9b59d623b78 |
publicationDate |
2014-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2014213239-A |
titleOfInvention |
Film formation method |
abstract |
Even when an expensive additive is not added to a film-forming composition, a thick film having a uniform film thickness of 50 μm or more can be formed on a large substrate having a diameter of 300 mm or more by a spin coating method. A method for forming a film is provided. Moreover, providing a board | substrate with a film provided with the film formed by the said film formation method. A film-forming composition containing a solvent having a vapor pressure and a viscosity within a predetermined range and a resin is spin-coated on a large substrate having a diameter of 300 mm or more so as to have a film thickness of 50 μm or more. Apply by the method. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017181895-A |
priorityDate |
2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |