http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014201493-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25ba42e5f214f100f81e5e2016f045ce |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-10 |
| filingDate | 2013-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f7106c938eb5cd5b3baa82e44ca5cfb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d8239a0738e57af715c15a866b16869 |
| publicationDate | 2014-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014201493-A |
| titleOfInvention | Manufacturing method of base substrate and manufacturing method of group III nitride semiconductor substrate |
| abstract | An object of the present invention is to provide a method for manufacturing a base substrate capable of improving the productivity of a group III nitride semiconductor substrate and a method for manufacturing a group III nitride semiconductor substrate using the manufacturing method. A method of manufacturing a base substrate includes forming a carbide layer 12 selected from aluminum carbide, titanium carbide, zirconium carbide, hafnium carbide, vanadium carbide, and tantalum carbide on a base layer 11. Nitriding the carbide layer, epitaxially growing the group III nitride semiconductor layer 15 on the nitrided carbide layer, the base layer 11, the nitrided carbide layer 12, and the group III nitride semiconductor layer 15 The layered body constituted by heat treatment is performed in a state where the laminate is immersed in a liquid of a group III element, the base material layer 11 is peeled off from the group III nitride semiconductor layer 15, and the III containing the group III nitride semiconductor layer 15 is removed. Obtaining a base substrate of the group nitride semiconductor. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016174069-A |
| priorityDate | 2013-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.